Abstract
We have studied atomic mixing in silicon by the classical molecular dynamics method, and directly compared the simulated data to experimental measurements. The relative importance of ballistic collisions and heat spike to the mixing is considered. We obtain a fairly good agreement between experiments and simulations. The heat spike contribution to the total mixing seems to be much lower than that of ballistic collisions.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 378-382 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 153 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - Jun 1999 |
| Event | Proceedings of the 1998 4th International Conference on Computer Simulation of Radiation Effects in Solids (COSIRES) - Okayama, Jpn Duration: Sep 15 1998 → Sep 19 1998 |
Funding
This work was supported by the Academy of Finland under project No. 35073. Two of us (J.T. and J.S.) thank the Magnus Ehrnrooth foundation for travel expense grants. Grants of computer time from the Center for Scientific Computing in Espoo, Finland are gratefully acknowledged.
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation