Heat spike and ballistic contributions to mixing in Si

J. Tarus*, K. Nordlund, J. Sillanpää, J. Keinonen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations

Abstract

We have studied atomic mixing in silicon by the classical molecular dynamics method, and directly compared the simulated data to experimental measurements. The relative importance of ballistic collisions and heat spike to the mixing is considered. We obtain a fairly good agreement between experiments and simulations. The heat spike contribution to the total mixing seems to be much lower than that of ballistic collisions.

Original languageEnglish (US)
Pages (from-to)378-382
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume153
Issue number1-4
DOIs
StatePublished - Jun 1999
EventProceedings of the 1998 4th International Conference on Computer Simulation of Radiation Effects in Solids (COSIRES) - Okayama, Jpn
Duration: Sep 15 1998Sep 19 1998

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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