Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films

Yun Young Kim, Rozidawati Awang, Sridhar Krishnaswamy, Hasan Adli Alwi*

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH4) mixed with helium (He). 5 different films were fabricated with He-to-CH4 flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp2 carbon cluster determined by spectroscopic measurements.

Original languageEnglish (US)
Pages (from-to)1-6
Number of pages6
JournalDiamond and Related Materials
Volume32
DOIs
StatePublished - Jan 1 2013

Keywords

  • Amorphous hydrogenated carbon
  • Chemical vapor deposition
  • Microstructure
  • Thermal properties

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films'. Together they form a unique fingerprint.

  • Cite this