Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films

Yun Young Kim; Rozidawati Awang; Sridhar Krishnaswamy; Hasan Adli Alwi

doi:10.1016/j.diamond.2012.11.009

Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films

Yun Young Kim, Rozidawati Awang, Sridhar Krishnaswamy, Hasan Adli Alwi^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH₄) mixed with helium (He). 5 different films were fabricated with He-to-CH₄ flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp² carbon cluster determined by spectroscopic measurements.

Original language	English (US)
Pages (from-to)	1-6
Number of pages	6
Journal	Diamond and Related Materials
Volume	32
DOIs	https://doi.org/10.1016/j.diamond.2012.11.009
State	Published - 2013

Keywords

Amorphous hydrogenated carbon
Chemical vapor deposition
Microstructure
Thermal properties

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanical Engineering
General Physics and Astronomy
Materials Chemistry
General Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2012.11.009

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title = "Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films",

abstract = "Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH4) mixed with helium (He). 5 different films were fabricated with He-to-CH4 flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp2 carbon cluster determined by spectroscopic measurements.",

keywords = "Amorphous hydrogenated carbon, Chemical vapor deposition, Microstructure, Thermal properties",

author = "Kim, {Yun Young} and Rozidawati Awang and Sridhar Krishnaswamy and Alwi, {Hasan Adli}",

note = "Funding Information: HAA thanks MOSTI , Malaysia for the financial support during the visit to Northwestern University, and MOHE , Malaysia for research grant UKM-ST-07-FRGS0020-2010 . RA thanks UKM for research grants UKM-GGPM-NBT-092-2010 and FRGS/1/2011/SG/UKM/02/20 . The samples were fabricated during RA's Ph.D. study with Prof. S.A. Rahman at the University of Malaya. SK acknowledges support from the US National Science Foundation research grant OISE-0730259 . Copyright: Copyright 2013 Elsevier B.V., All rights reserved.",

year = "2013",

doi = "10.1016/j.diamond.2012.11.009",

language = "English (US)",

volume = "32",

pages = "1--6",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

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AU - Kim, Yun Young

AU - Awang, Rozidawati

AU - Krishnaswamy, Sridhar

AU - Alwi, Hasan Adli

N1 - Funding Information: HAA thanks MOSTI , Malaysia for the financial support during the visit to Northwestern University, and MOHE , Malaysia for research grant UKM-ST-07-FRGS0020-2010 . RA thanks UKM for research grants UKM-GGPM-NBT-092-2010 and FRGS/1/2011/SG/UKM/02/20 . The samples were fabricated during RA's Ph.D. study with Prof. S.A. Rahman at the University of Malaya. SK acknowledges support from the US National Science Foundation research grant OISE-0730259 . Copyright: Copyright 2013 Elsevier B.V., All rights reserved.

PY - 2013

Y1 - 2013

N2 - Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH4) mixed with helium (He). 5 different films were fabricated with He-to-CH4 flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp2 carbon cluster determined by spectroscopic measurements.

AB - Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH4) mixed with helium (He). 5 different films were fabricated with He-to-CH4 flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp2 carbon cluster determined by spectroscopic measurements.

KW - Amorphous hydrogenated carbon

KW - Chemical vapor deposition

KW - Microstructure

KW - Thermal properties

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ER -

Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films

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Keywords

ASJC Scopus subject areas

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