Keyphrases
Helium
100%
Amorphous Carbon Film
100%
Thermophysical Properties
100%
Hydrogenated Amorphous Carbon
100%
Dilution Effect
100%
Helium Dilution
100%
Microstructural Changes
50%
Strong Correlation
50%
Methane
50%
Thermal Properties
50%
Depositional System
50%
Spectroscopic Measurement
50%
Thermal Diffusivity
50%
Carbon Clusters
50%
Sp2 Carbon
50%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
50%
Direct-current Plasma
50%
Time-domain Thermoreflectance
50%
Ultrafast Optical
50%
Paddock
50%
Flow Rate Ratio
50%
Optical Pump-probe Technique
50%
Engineering
Amorphous Hydrogenated Carbon
100%
Thin Films
100%
Dilution
100%
Methane
100%
Flow Rate
33%
Time Domain
33%
Deposition System
33%
Chemical Vapor Deposition
33%
Vapor Deposition
33%
Flow Velocity
33%
Thermal Diffusivity
33%
Direct Current
33%
Material Science
Amorphous Hydrogenated Carbon
100%
Thermophysical Property
100%
Thin Films
100%
Dilution
100%
Plasma-Enhanced Chemical Vapor Deposition
50%
Film
50%
Thermal Property
50%
Diffusivity
50%
Physics
Methane
100%
Thin Films
100%
Flow Velocity
33%
Diffusivity
33%
Vapor Deposition
33%
Plasma Current
33%