Heteroepitaxial Growth of Transition-Metal Nitride Films

M. Shinn, P. B. Mirkarimi, Scott A. Barnett

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	MRS Symposium Proceeding Vol. 263
Editors	M. S. Chisholm, R. Hull, L. J. Schowalter, B. J. Garrison
Publisher	MRS
State	Published - 1992
Event	Mechanisms of Heteroepitaxial Growth - Pittsburgh, PA Duration: Jan 1 1992 → …

Conference	Mechanisms of Heteroepitaxial Growth
Period	1/1/92 → …

Cite this

@inproceedings{bc422a9641a14a678b4ad7cd72b5574c,

title = "Heteroepitaxial Growth of Transition-Metal Nitride Films",

author = "M. Shinn and Mirkarimi, {P. B.} and Barnett, {Scott A.}",

year = "1992",

language = "English",

editor = "Chisholm, {M. S.} and R. Hull and Schowalter, {L. J.} and Garrison, {B. J.}",

booktitle = "MRS Symposium Proceeding Vol. 263",

publisher = "MRS",

note = "Mechanisms of Heteroepitaxial Growth ; Conference date: 01-01-1992",

}

TY - GEN

T1 - Heteroepitaxial Growth of Transition-Metal Nitride Films

AU - Shinn, M.

AU - Mirkarimi, P. B.

AU - Barnett, Scott A.

PY - 1992

Y1 - 1992

M3 - Conference contribution

BT - MRS Symposium Proceeding Vol. 263

A2 - Chisholm, M. S.

A2 - Hull, R.

A2 - Schowalter, L. J.

A2 - Garrison, B. J.

PB - MRS

T2 - Mechanisms of Heteroepitaxial Growth

Y2 - 1 January 1992

ER -