Abstract
We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.
Original language | English (US) |
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Article number | 5729782 |
Pages (from-to) | 2246-2253 |
Number of pages | 8 |
Journal | IEEE Sensors Journal |
Volume | 11 |
Issue number | 10 |
DOIs | |
State | Published - 2011 |
Funding
Manuscript received February 04, 2011; accepted March 06, 2011. Date of publication March 14, 2011; date of current version August 05, 2011. This work was supported in part by the NSF Center for Chemical-Electrical-Mechanical Manufacturing Systems, in part by the Defense Advanced Research Projects Agency, and in part by a Carver Fellowship for JHP. The associate editor coordinating the review of this paper and approving it for publication was Dr. Sandro Carrara.
Keywords
- Electrohydrodynamics
- mass sensing
- microcantilever
- microelectromechanical systems
- polymer deposition
- polymer printing
- sensor
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering