High-precision film thickness determination using a laser-based ultrasonic technique

Matthew J. Banet; Martin Fuchs; John A. Rogers; James H. Reinold; Jeffrey M. Knecht; Mordechai Rothschild; Randy Logan; A. A. Maznev; Keith A. Nelson

doi:10.1063/1.121780

High-precision film thickness determination using a laser-based ultrasonic technique

Matthew J. Banet^*, Martin Fuchs, John A. Rogers, James H. Reinold, Jeffrey M. Knecht, Mordechai Rothschild, Randy Logan, A. A. Maznev, Keith A. Nelson

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

37 Scopus citations

Abstract

A noncontact and nondestructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of metal films including Cu, Ta, W, Al, Ti, and others in single-layer and multilayer assemblies on silicon substrates. Other opaque film materials and substrates have also been examined. Thicknesses are determined with a repeatability of a few angstroms with data acquisition times of about 1 s. ISTS and conventional measurements (scanning electron microscopy, profilometry, and four-point electrical sheet resistance) are made on the same samples and the results are found to compare favorably.

Original language	English (US)
Pages (from-to)	169-171
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	2
DOIs	https://doi.org/10.1063/1.121780
State	Published - 1998

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.121780

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title = "High-precision film thickness determination using a laser-based ultrasonic technique",

abstract = "A noncontact and nondestructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of metal films including Cu, Ta, W, Al, Ti, and others in single-layer and multilayer assemblies on silicon substrates. Other opaque film materials and substrates have also been examined. Thicknesses are determined with a repeatability of a few angstroms with data acquisition times of about 1 s. ISTS and conventional measurements (scanning electron microscopy, profilometry, and four-point electrical sheet resistance) are made on the same samples and the results are found to compare favorably.",

author = "Banet, {Matthew J.} and Martin Fuchs and Rogers, {John A.} and Reinold, {James H.} and Knecht, {Jeffrey M.} and Mordechai Rothschild and Randy Logan and Maznev, {A. A.} and Nelson, {Keith A.}",

year = "1998",

doi = "10.1063/1.121780",

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T1 - High-precision film thickness determination using a laser-based ultrasonic technique

AU - Banet, Matthew J.

AU - Fuchs, Martin

AU - Rogers, John A.

AU - Reinold, James H.

AU - Knecht, Jeffrey M.

AU - Rothschild, Mordechai

AU - Logan, Randy

AU - Maznev, A. A.

AU - Nelson, Keith A.

PY - 1998

Y1 - 1998

N2 - A noncontact and nondestructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of metal films including Cu, Ta, W, Al, Ti, and others in single-layer and multilayer assemblies on silicon substrates. Other opaque film materials and substrates have also been examined. Thicknesses are determined with a repeatability of a few angstroms with data acquisition times of about 1 s. ISTS and conventional measurements (scanning electron microscopy, profilometry, and four-point electrical sheet resistance) are made on the same samples and the results are found to compare favorably.

AB - A noncontact and nondestructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of metal films including Cu, Ta, W, Al, Ti, and others in single-layer and multilayer assemblies on silicon substrates. Other opaque film materials and substrates have also been examined. Thicknesses are determined with a repeatability of a few angstroms with data acquisition times of about 1 s. ISTS and conventional measurements (scanning electron microscopy, profilometry, and four-point electrical sheet resistance) are made on the same samples and the results are found to compare favorably.

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High-precision film thickness determination using a laser-based ultrasonic technique

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