Keyphrases
(111) Silicon
100%
AlN Thin Film
33%
Basal Plane
66%
GaN Epilayer
100%
GaN Films
33%
GaN Thin Film
33%
GaN-on-sapphire
33%
Low Pressure
33%
Luminescence
33%
Metal-organic Chemical Vapor Deposition (MOCVD)
33%
Optical Transmission
33%
Photoluminescence
33%
Room Temperature
33%
Sapphire
100%
Silicon Substrate
100%
X-ray Rocking Curve
33%
Physics
Linewidth
100%
Metalorganic Chemical Vapor Deposition
100%
Photoluminescence
100%
Room Temperature
100%
Thin Films
100%
X-Ray Diffractogram
100%
Material Science
Aluminum Nitride
50%
Chemical Vapor Deposition
25%
Epilayers
100%
Film
50%
Linewidth
25%
Luminescence
25%
Photoluminescence
25%
Sapphire
100%
Silicon
100%
Thin Films
25%
X-Ray Diffractogram
25%
Engineering
Basal Plane
100%
Chemical Vapor Deposition
50%
Optical Transmission
50%
Room Temperature
50%
Silicon Substrate
100%
Thin Films
50%
Vapor Deposition
50%