Abstract
High quantum efficiency of 60% under no applied bias for AlGaN-based p-i-n solar-blind photodiodes was demonstrated. The external quantum efficiency can be improved to a value as high as 72% under 5 V reverse bias. The high performance of the devices was due to the high quality AlN and AlGaN/AlN superlattice layers as well as high lateral conductivity n-type AlGaN. The high quality template layers helps reduce the number of defects in the device structure and keeps the subsequent layers under compressive strain to avoid cracking.
Original language | English (US) |
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Pages (from-to) | 1248-1250 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 84 |
Issue number | 8 |
DOIs | |
State | Published - Feb 23 2004 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)