High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

Original languageEnglish (US)
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages23-24
Number of pages2
DOIs
StatePublished - Dec 1 2013
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: Aug 18 2013Aug 22 2013

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period8/18/138/22/13

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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