High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Jae Woong Jeong; Bryan Park; Hohyun Keum; Seok Kim; John A. Rogers; Olav Solgaard

doi:10.1109/OMN.2013.6659040

High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

Original language	English (US)
Title of host publication	Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages	23-24
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2013.6659040
State	Published - Dec 1 2013
Event	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan Duration: Aug 18 2013 → Aug 22 2013

Other

Other	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Country/Territory	Japan
City	Kanazawa
Period	8/18/13 → 8/22/13

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2013.6659040

Cite this

@inproceedings{193c497978424b888228b35c29b5a5ef,

title = "High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing",

abstract = "We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.",

author = "Jeong, {Jae Woong} and Bryan Park and Hohyun Keum and Seok Kim and Rogers, {John A.} and Olav Solgaard",

year = "2013",

month = dec,

day = "1",

doi = "10.1109/OMN.2013.6659040",

language = "English (US)",

isbn = "9781479915125",

pages = "23--24",

booktitle = "Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings",

note = "2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 ; Conference date: 18-08-2013 Through 22-08-2013",

}

Jeong, JW, Park, B, Keum, H, Kim, S, Rogers, JA & Solgaard, O 2013, High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing. in Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings., 6659040, pp. 23-24, 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013, Kanazawa, Japan, 8/18/13. https://doi.org/10.1109/OMN.2013.6659040

TY - GEN

T1 - High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

AU - Jeong, Jae Woong

AU - Park, Bryan

AU - Keum, Hohyun

AU - Kim, Seok

AU - Rogers, John A.

AU - Solgaard, Olav

PY - 2013/12/1

Y1 - 2013/12/1

N2 - We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

AB - We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

UR - http://www.scopus.com/inward/record.url?scp=84892185459&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84892185459&partnerID=8YFLogxK

U2 - 10.1109/OMN.2013.6659040

DO - 10.1109/OMN.2013.6659040

M3 - Conference contribution

AN - SCOPUS:84892185459

SN - 9781479915125

SP - 23

EP - 24

BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings

T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013

Y2 - 18 August 2013 through 22 August 2013

ER -

High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Abstract

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this