Keyphrases
Electron Microscopy Studies
100%
High-resolution Electron Microscopy
100%
Tunnel Junction
100%
AlON
100%
Nitridation Time
100%
Barrier Layer
66%
AlN Barrier
66%
High-resolution Electron Energy Loss Spectroscopy (HREELS)
33%
Compositional Mapping
33%
Competition Process
33%
Spin-dependent
33%
Exposure Time
33%
Plasma Gases
33%
Overexposure
33%
Tunnel Barrier
33%
Ferromagnetic Layer
33%
Gas Composition
33%
Deposit Thickness
33%
Barrier Thickness
33%
Nitride Formation
33%
Plasma Exposure
33%
Thin Barrier
33%
Nitrogen Plasma
33%
Plasma Nitriding
33%
Plasma Nitridation
33%
Al Deposition
33%
Engineering
High Resolution
100%
Tunnel Construction
100%
Barrier Layer
100%
Tunnel
100%
Energy Dissipation
50%
Nitride
50%
Exposure Time
50%
Competing Process
50%
Overexposure
50%
Gas Composition
50%
Electron Energy
50%
Material Science
Aluminum Nitride
100%
Nitriding
100%
Aluminum Oxynitride
100%
High-Resolution Transmission Electron Microscopy
100%
Electron Energy Loss Spectrometry
33%
Nitride Compound
33%