High-resolution subsurface imaging of silicon-integrated circuits

M. Selim Ünlü*, Stephen B. Ippolito, Bennett B. Goldberg

*Corresponding author for this work

Research output: Contribution to specialist publicationArticle

3 Scopus citations

Abstract

A high-resolution subsurface microscopy technique, that significantly increases the numerical aperture without introducing spherical aberration was developed. The technique improves the diffraction-limited resolution beyond the limit of standard subsurface microscopy. It was found that by reducing the wavelength or increasing the collected solid angle, the spatial resolution of surface microscopy, was improved.

Original languageEnglish (US)
Number of pages1
Volume12
No12
Specialist publicationOptics and Photonics News
DOIs
StatePublished - Jan 1 2001

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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