High resolution subsurface thermal imaging using a numerical aperture increasing lens

M. G. Eraslan, A. N. Vamivakas, S. B. Ippolito, M. S. Ünlü, B. B. Goldberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens. Highresolution thermal imaging has applications in failure analysis of Si integrated circuits.

Original languageEnglish (US)
Title of host publicationQuantum Electronics and Laser Science Conference, QELS 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
StatePublished - Jan 1 2005
EventQuantum Electronics and Laser Science Conference, QELS 2005 - Baltimore, MD, United States
Duration: May 22 2005May 22 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherQuantum Electronics and Laser Science Conference, QELS 2005
CountryUnited States
CityBaltimore, MD
Period5/22/055/22/05

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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