High resolution subsurface thermal imaging using a numerical aperture increasing lens

M. G. Eraslan*, A. N. Vamivakas, S. B. Ippolito, M. S. Ünlü, B. B. Goldberg

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens. High-resolution thermal imaging has applications in failure analysis of Si integrated circuits.

Original languageEnglish (US)
Title of host publication2005 Quantum Electronics and Laser Science Conference (QELS)
Pages377-379
Number of pages3
StatePublished - Oct 31 2005
Event2005 Quantum Electronics and Laser Science Conference (QELS) - Baltimore, MD, United States
Duration: May 22 2005May 27 2005

Publication series

NameQuantum Electronics and Laser Science Conference (QELS)
Volume1

Other

Other2005 Quantum Electronics and Laser Science Conference (QELS)
Country/TerritoryUnited States
CityBaltimore, MD
Period5/22/055/27/05

ASJC Scopus subject areas

  • Engineering(all)

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