High-sensitivity bi-directional flow sensor based on biological inspiration of animal haircell sensors

Craig Tucker*, Nannan Chen, Jonathan Engel, Yingchen Yang, Saunvit Pandya, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

Artificial Haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6mm/s flow rates, steady state flow fields detected down to 0.1mm/s.

Original languageEnglish (US)
Title of host publication2006 5th IEEE Conference on Sensors
Pages1440-1442
Number of pages3
DOIs
StatePublished - Dec 1 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: Oct 22 2006Oct 25 2006

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period10/22/0610/25/06

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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