High spatial resolution photodetectors based on nanoscale three-dimensional structures

Boyang Liu*, Yicheng Lai, Seng Tiong Ho

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


A high spatial resolution photodetector is designed and realized using a newly developed two-sided nanoscale three-dimensional fabrication technique. Two types of nanophotodetectors with slab and channel structures are fabricated and characterized. By comparison, nanophotodetectors with channel structures show a 10 times lower dark current, higher detection resolution, and signal-to-noise ratio than nanophotodetectors with slab structures. The smallest nanophotodetector fabricated is as small as 100 nm wide. A responsivity of 0.19 A/W at 1310-nm wavelength and 3-V bias for a channelized nanophotodetector is registered, with a photocurrent of 135 nA over a dark current of 1.25 nA. In addition, using a modified near-field scanning optical microscopy-based photocurrent mapping system, we demonstrated a high spatial resolution photodetection of 400 nm using a nanophotodetector with channel structure fabricated.

Original languageEnglish (US)
Article number5445004
Pages (from-to)929-931
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number12
StatePublished - 2010


  • High spatial resolution
  • Photodetectors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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