High spatial resolution photodetectors based on nanoscale three-dimensional structures

Boyang Liu; Yicheng Lai; Seng Tiong Ho

doi:10.1109/LPT.2010.2047255

High spatial resolution photodetectors based on nanoscale three-dimensional structures

Boyang Liu^*, Yicheng Lai, Seng Tiong Ho

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A high spatial resolution photodetector is designed and realized using a newly developed two-sided nanoscale three-dimensional fabrication technique. Two types of nanophotodetectors with slab and channel structures are fabricated and characterized. By comparison, nanophotodetectors with channel structures show a 10 times lower dark current, higher detection resolution, and signal-to-noise ratio than nanophotodetectors with slab structures. The smallest nanophotodetector fabricated is as small as 100 nm wide. A responsivity of 0.19 A/W at 1310-nm wavelength and 3-V bias for a channelized nanophotodetector is registered, with a photocurrent of 135 nA over a dark current of 1.25 nA. In addition, using a modified near-field scanning optical microscopy-based photocurrent mapping system, we demonstrated a high spatial resolution photodetection of 400 nm using a nanophotodetector with channel structure fabricated.

Original language	English (US)
Article number	5445004
Pages (from-to)	929-931
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	22
Issue number	12
DOIs	https://doi.org/10.1109/LPT.2010.2047255
State	Published - 2010

Keywords

High spatial resolution
Photodetectors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2010.2047255

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title = "High spatial resolution photodetectors based on nanoscale three-dimensional structures",

abstract = "A high spatial resolution photodetector is designed and realized using a newly developed two-sided nanoscale three-dimensional fabrication technique. Two types of nanophotodetectors with slab and channel structures are fabricated and characterized. By comparison, nanophotodetectors with channel structures show a 10 times lower dark current, higher detection resolution, and signal-to-noise ratio than nanophotodetectors with slab structures. The smallest nanophotodetector fabricated is as small as 100 nm wide. A responsivity of 0.19 A/W at 1310-nm wavelength and 3-V bias for a channelized nanophotodetector is registered, with a photocurrent of 135 nA over a dark current of 1.25 nA. In addition, using a modified near-field scanning optical microscopy-based photocurrent mapping system, we demonstrated a high spatial resolution photodetection of 400 nm using a nanophotodetector with channel structure fabricated.",

keywords = "High spatial resolution, Photodetectors",

author = "Boyang Liu and Yicheng Lai and Ho, {Seng Tiong}",

note = "Funding Information: Manuscript received February 07, 2010; revised February 28, 2010; accepted March 20, 2010. Date of publication April 08, 2010; date of current version June 03, 2010. This work was supported in part by the NSF under Award ECS-0501589 and Award ECCS 0622185, and in part by the National Center for Learning and Teaching in Nanoscale Science and Engineering (NCLT) under the NSF Grant 0426328. This work was carried in part out at the Cornell Nanofab-rication Facility (CNF), which is supported by the NSF, Cornell University, and the industrial affiliates under Project 136605.",

year = "2010",

doi = "10.1109/LPT.2010.2047255",

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AU - Ho, Seng Tiong

N1 - Funding Information: Manuscript received February 07, 2010; revised February 28, 2010; accepted March 20, 2010. Date of publication April 08, 2010; date of current version June 03, 2010. This work was supported in part by the NSF under Award ECS-0501589 and Award ECCS 0622185, and in part by the National Center for Learning and Teaching in Nanoscale Science and Engineering (NCLT) under the NSF Grant 0426328. This work was carried in part out at the Cornell Nanofab-rication Facility (CNF), which is supported by the NSF, Cornell University, and the industrial affiliates under Project 136605.

PY - 2010

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N2 - A high spatial resolution photodetector is designed and realized using a newly developed two-sided nanoscale three-dimensional fabrication technique. Two types of nanophotodetectors with slab and channel structures are fabricated and characterized. By comparison, nanophotodetectors with channel structures show a 10 times lower dark current, higher detection resolution, and signal-to-noise ratio than nanophotodetectors with slab structures. The smallest nanophotodetector fabricated is as small as 100 nm wide. A responsivity of 0.19 A/W at 1310-nm wavelength and 3-V bias for a channelized nanophotodetector is registered, with a photocurrent of 135 nA over a dark current of 1.25 nA. In addition, using a modified near-field scanning optical microscopy-based photocurrent mapping system, we demonstrated a high spatial resolution photodetection of 400 nm using a nanophotodetector with channel structure fabricated.

AB - A high spatial resolution photodetector is designed and realized using a newly developed two-sided nanoscale three-dimensional fabrication technique. Two types of nanophotodetectors with slab and channel structures are fabricated and characterized. By comparison, nanophotodetectors with channel structures show a 10 times lower dark current, higher detection resolution, and signal-to-noise ratio than nanophotodetectors with slab structures. The smallest nanophotodetector fabricated is as small as 100 nm wide. A responsivity of 0.19 A/W at 1310-nm wavelength and 3-V bias for a channelized nanophotodetector is registered, with a photocurrent of 135 nA over a dark current of 1.25 nA. In addition, using a modified near-field scanning optical microscopy-based photocurrent mapping system, we demonstrated a high spatial resolution photodetection of 400 nm using a nanophotodetector with channel structure fabricated.

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High spatial resolution photodetectors based on nanoscale three-dimensional structures

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