High spatial resolution subsurface microscopy

S. B. Ippolito; B. B. Goldberg; M. S. Ünlü

doi:10.1063/1.1381574

High spatial resolution subsurface microscopy

S. B. Ippolito^*, B. B. Goldberg, M. S. Ünlü

^*Corresponding author for this work

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

200 Scopus citations

Abstract

We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.

Original language	English (US)
Pages (from-to)	4071-4073
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	26
DOIs	https://doi.org/10.1063/1.1381574
State	Published - Jun 25 2001

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1381574

Cite this

@article{8c7c6dc15216466190fa269edd7b9c0f,

title = "High spatial resolution subsurface microscopy",

abstract = "We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.",

author = "Ippolito, {S. B.} and Goldberg, {B. B.} and {\"U}nl{\"u}, {M. S.}",

year = "2001",

month = jun,

day = "25",

doi = "10.1063/1.1381574",

language = "English (US)",

volume = "78",

pages = "4071--4073",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "26",

}

TY - JOUR

T1 - High spatial resolution subsurface microscopy

AU - Ippolito, S. B.

AU - Goldberg, B. B.

AU - Ünlü, M. S.

PY - 2001/6/25

Y1 - 2001/6/25

N2 - We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.

AB - We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.

UR - http://www.scopus.com/inward/record.url?scp=0035948103&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035948103&partnerID=8YFLogxK

U2 - 10.1063/1.1381574

DO - 10.1063/1.1381574

M3 - Article

AN - SCOPUS:0035948103

SN - 0003-6951

VL - 78

SP - 4071

EP - 4073

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

ER -

High spatial resolution subsurface microscopy

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this