High spatial resolution subsurface microscopy

S. B. Ippolito*, B. B. Goldberg, M. S. Ünlü

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

187 Scopus citations

Abstract

We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.

Original languageEnglish (US)
Pages (from-to)4071-4073
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number26
DOIs
StatePublished - Jun 25 2001

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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