High spatial resolution subsurface microscopy using radially polarized beam

Abdulkadir Yurt; Michael D W Grogan; Yang Lu; Euan Ramsay; M. Selim Unlu; Siddharth Ramachandran; Bennett B. Goldberg

doi:10.1109/IPCon.2012.6359251

High spatial resolution subsurface microscopy using radially polarized beam

Abdulkadir Yurt^*, Michael D W Grogan, Yang Lu, Euan Ramsay, M. Selim Unlu, Siddharth Ramachandran, Bennett B. Goldberg

^*Corresponding author for this work

Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We experimentally study spot size reduction by using radially polarized beam for subsurface silicon integrated circuit microscopy. Metallic lines fabricated on a silicon substrate with linewidth / spacing ∼ 130nm / 70nm were resolved through the substrate at λ₀ = 1310nm.

Original language	English (US)
Title of host publication	2012 IEEE Photonics Conference, IPC 2012
Publisher	IEEE Computer Society
Pages	554-556
Number of pages	3
ISBN (Print)	9781457707315
DOIs	https://doi.org/10.1109/IPCon.2012.6359251
State	Published - 2012
Event	25th IEEE Photonics Conference, IPC 2012 - Burlingame, CA, United States Duration: Sep 23 2012 → Sep 27 2012

Publication series

Name	2012 IEEE Photonics Conference, IPC 2012

Other

Other	25th IEEE Photonics Conference, IPC 2012
Country/Territory	United States
City	Burlingame, CA
Period	9/23/12 → 9/27/12

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/IPCon.2012.6359251

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@inproceedings{0abfbce432dd4d3b92a00811f4311782,

title = "High spatial resolution subsurface microscopy using radially polarized beam",

abstract = "We experimentally study spot size reduction by using radially polarized beam for subsurface silicon integrated circuit microscopy. Metallic lines fabricated on a silicon substrate with linewidth / spacing ∼ 130nm / 70nm were resolved through the substrate at λ0 = 1310nm.",

author = "Abdulkadir Yurt and Grogan, {Michael D W} and Yang Lu and Euan Ramsay and Unlu, {M. Selim} and Siddharth Ramachandran and Goldberg, {Bennett B.}",

year = "2012",

doi = "10.1109/IPCon.2012.6359251",

language = "English (US)",

isbn = "9781457707315",

series = "2012 IEEE Photonics Conference, IPC 2012",

publisher = "IEEE Computer Society",

pages = "554--556",

booktitle = "2012 IEEE Photonics Conference, IPC 2012",

address = "United States",

note = "25th IEEE Photonics Conference, IPC 2012 ; Conference date: 23-09-2012 Through 27-09-2012",

}

Yurt, A, Grogan, MDW, Lu, Y, Ramsay, E, Unlu, MS, Ramachandran, S & Goldberg, BB 2012, High spatial resolution subsurface microscopy using radially polarized beam. in 2012 IEEE Photonics Conference, IPC 2012., 6359251, 2012 IEEE Photonics Conference, IPC 2012, IEEE Computer Society, pp. 554-556, 25th IEEE Photonics Conference, IPC 2012, Burlingame, CA, United States, 9/23/12. https://doi.org/10.1109/IPCon.2012.6359251

TY - GEN

T1 - High spatial resolution subsurface microscopy using radially polarized beam

AU - Yurt, Abdulkadir

AU - Grogan, Michael D W

AU - Lu, Yang

AU - Ramsay, Euan

AU - Unlu, M. Selim

AU - Ramachandran, Siddharth

AU - Goldberg, Bennett B.

PY - 2012

Y1 - 2012

N2 - We experimentally study spot size reduction by using radially polarized beam for subsurface silicon integrated circuit microscopy. Metallic lines fabricated on a silicon substrate with linewidth / spacing ∼ 130nm / 70nm were resolved through the substrate at λ0 = 1310nm.

AB - We experimentally study spot size reduction by using radially polarized beam for subsurface silicon integrated circuit microscopy. Metallic lines fabricated on a silicon substrate with linewidth / spacing ∼ 130nm / 70nm were resolved through the substrate at λ0 = 1310nm.

UR - http://www.scopus.com/inward/record.url?scp=84871788976&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871788976&partnerID=8YFLogxK

U2 - 10.1109/IPCon.2012.6359251

DO - 10.1109/IPCon.2012.6359251

M3 - Conference contribution

AN - SCOPUS:84871788976

SN - 9781457707315

T3 - 2012 IEEE Photonics Conference, IPC 2012

SP - 554

EP - 556

BT - 2012 IEEE Photonics Conference, IPC 2012

PB - IEEE Computer Society

T2 - 25th IEEE Photonics Conference, IPC 2012

Y2 - 23 September 2012 through 27 September 2012

ER -

High spatial resolution subsurface microscopy using radially polarized beam

Abstract

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