TY - JOUR
T1 - High-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems
AU - Yang, Quansan
AU - Hu, Ziying
AU - Seo, Min Ho
AU - Xu, Yameng
AU - Yan, Ying
AU - Hsu, Yen Hao
AU - Berkovich, Jaime
AU - Lee, Kwonjae
AU - Liu, Tzu Li
AU - McDonald, Samantha
AU - Nie, Haolin
AU - Oh, Hannah
AU - Wu, Mingzheng
AU - Kim, Jin Tae
AU - Miller, Stephen A.
AU - Jia, Ying
AU - Butun, Serkan
AU - Bai, Wubin
AU - Guo, Hexia
AU - Choi, Junhwan
AU - Banks, Anthony
AU - Ray, Wilson Z.
AU - Kozorovitskiy, Yevgenia
AU - Becker, Matthew L.
AU - Pet, Mitchell A.
AU - MacEwan, Matthew R.
AU - Chang, Jan Kai
AU - Wang, Heling
AU - Huang, Yonggang
AU - Rogers, John A.
N1 - Funding Information:
This work was supported by the Querrey Simpson Institute for Bioelectronics at Northwestern University. We thank Rory S. Grondin and Drago Kovačič at LPKF Laser & Electronics AG for the helpful discussions. This work made use of the NUFAB facility of Northwestern University’s NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-2025633); the MRSEC program (NSF DMR-1720139) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; the Querrey Simpson Institute for Bioelectronics; the Keck Biophysics Facility, a shared resource of the Robert H. Lurie Comprehensive Cancer Center of Northwestern University, which has received support in part by the NCI Cancer Center Support (P30 CA060553); the Center for Advanced Molecular Imaging (RRID:SCR_021192); Northwestern University; and the State of Illinois, through the IIN. Elemental analysis was performed at the Northwestern University Quantitative Bio-element Imaging Center generously supported by NASA Ames Research Center Grant (NNA04CC36G). M.H.S. acknowledges support from the Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health & Welfare, Republic of Korea (HI18C2383). Y.H. acknowledges support from the National Science Foundation (NSF CMMI 16-35443). The diagrams, including human model with organs (Fig. ), mouse model (Fig. ), and ovine model (Fig. ), were created with BioRender.com.
Publisher Copyright:
© 2022, The Author(s).
PY - 2022/12
Y1 - 2022/12
N2 - Physically transient forms of electronics enable unique classes of technologies, ranging from biomedical implants that disappear through processes of bioresorption after serving a clinical need to internet-of-things devices that harmlessly dissolve into the environment following a relevant period of use. Here, we develop a sustainable manufacturing pathway, based on ultrafast pulsed laser ablation, that can support high-volume, cost-effective manipulation of a diverse collection of organic and inorganic materials, each designed to degrade by hydrolysis or enzymatic activity, into patterned, multi-layered architectures with high resolution and accurate overlay registration. The technology can operate in patterning, thinning and/or cutting modes with (ultra)thin eco/bioresorbable materials of different types of semiconductors, dielectrics, and conductors on flexible substrates. Component-level demonstrations span passive and active devices, including diodes and field-effect transistors. Patterning these devices into interconnected layouts yields functional systems, as illustrated in examples that range from wireless implants as monitors of neural and cardiac activity, to thermal probes of microvascular flow, and multi-electrode arrays for biopotential sensing. These advances create important processing options for eco/bioresorbable materials and associated electronic systems, with immediate applicability across nearly all types of bioelectronic studies.
AB - Physically transient forms of electronics enable unique classes of technologies, ranging from biomedical implants that disappear through processes of bioresorption after serving a clinical need to internet-of-things devices that harmlessly dissolve into the environment following a relevant period of use. Here, we develop a sustainable manufacturing pathway, based on ultrafast pulsed laser ablation, that can support high-volume, cost-effective manipulation of a diverse collection of organic and inorganic materials, each designed to degrade by hydrolysis or enzymatic activity, into patterned, multi-layered architectures with high resolution and accurate overlay registration. The technology can operate in patterning, thinning and/or cutting modes with (ultra)thin eco/bioresorbable materials of different types of semiconductors, dielectrics, and conductors on flexible substrates. Component-level demonstrations span passive and active devices, including diodes and field-effect transistors. Patterning these devices into interconnected layouts yields functional systems, as illustrated in examples that range from wireless implants as monitors of neural and cardiac activity, to thermal probes of microvascular flow, and multi-electrode arrays for biopotential sensing. These advances create important processing options for eco/bioresorbable materials and associated electronic systems, with immediate applicability across nearly all types of bioelectronic studies.
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U2 - 10.1038/s41467-022-34173-0
DO - 10.1038/s41467-022-34173-0
M3 - Article
C2 - 36316354
AN - SCOPUS:85140935330
SN - 2041-1723
VL - 13
JO - Nature Communications
JF - Nature Communications
IS - 1
M1 - 6518
ER -
