High speed/low dose analytical electron microscopy with dynamic sampling

Technological advances in electron microscopy, particularly improved detectors and aberration correctors, have led to higher throughput and less invasive imaging of materials and biological structures by enhancing signal-to-noise ratios at lower electron exposures. Analytical methods, such as electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectrometry (EDS), have also benefitted and offer a rich set of local elemental and bonding information with nano-or atomic resolution. However, spatially resolved spectrum imaging with EELS and EDS continue to be difficult to scale due to limited detector collection angles or high signal background, requiring hours or even days for full maps. We present the principle and application of a Multi-Objective Autonomous Dynamic Sampling (MOADS) method which can accelerate spectrum mapping in EELS or EDS by over an order of magnitude. Initial guesses about the true spectrum images are constructed as measurements are collected, which allows the prediction of points which contribute information/contrast. In this fashion, an intelligently selected and reduced set of points which best approximate the true spectrum image are autonomously collected on-the-fly to save considerable time and/or radiative area dose.