High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices

C. Engström, A. Madan, J. Birch, M. Nastasi, L. Hultman, S. A. Barnett

Research output: Contribution to journalArticle

17 Scopus citations


The effect of 1000 °C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo-Nb-N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices. The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure.

Original languageEnglish (US)
Pages (from-to)554-559
Number of pages6
JournalJournal of Materials Research
Issue number2
StatePublished - Feb 2000

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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