High-throughput realization of an infrared selective absorber/emitter by DUV microsphere projection lithography

Keyphrases

• High-throughput 100%
• Projection Lithography 100%
• Selective Absorber 100%
• Nanofabrication 50%
• Mid-infrared 50%
• Electromagnetic Spectrum 50%
• Numerical Simulation 50%
• High Performance 50%
• Metasurface 50%
• Arbitrary Patterns 50%
• Cell Performance 50%
• Emission Features 50%
• Spectral Absorption 50%
• Selective Absorption 50%
• Perfect Absorption 50%
• Thermophotovoltaic Cell 50%
• Infrared Absorber 50%

Engineering

• Microsphere 100%
• Lithography 100%
• Selective Absorber 100%
• Realization 100%
• Feature Size 50%
• Infrared Region 50%
• Critical Element 50%
• Metasurface 50%
• Nanofabrication Process 50%
• Thermophotovoltaic 50%
• Computer Simulation 50%
• Bioinstrumentation 50%

Material Science

• Lithography 100%
• Microsphere 100%
• Thermophotovoltaics 50%
• Absorption Spectra 50%