High-yield assembly of hinged 3-D optical MEMS devices using magnetic actuation

Yong Yi*, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

We have developed a magnetic actuation process for hinged, surface micromachined structures to assemble three-dimensional optical devices with high efficiency and high yield. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. Preliminary design rules for achieving asynchronous actuation of hinged microstructures have been established to enable effective parallel assembly of three-dimensional devices. We have demonstrated parallel actuation of arrays of individual microstructures and three-dimensional assemblies under a globally applied external magnetic field.

Original languageEnglish (US)
Pages (from-to)125-134
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3511
DOIs
StatePublished - Dec 1 1998
EventMicromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States
Duration: Sep 21 1998Sep 22 1998

Keywords

  • Hinged microstructures
  • Magnetic actuation
  • Three-dimensional assembly

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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