Abstract
We have developed a magnetic actuation process for hinged, surface micromachined structures to assemble three-dimensional optical devices with high efficiency and high yield. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. Preliminary design rules for achieving asynchronous actuation of hinged microstructures have been established to enable effective parallel assembly of three-dimensional devices. We have demonstrated parallel actuation of arrays of individual microstructures and three-dimensional assemblies under a globally applied external magnetic field.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 125-134 |
| Number of pages | 10 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3511 |
| DOIs | |
| State | Published - 1998 |
| Event | Micromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States Duration: Sep 21 1998 → Sep 22 1998 |
Keywords
- Hinged microstructures
- Magnetic actuation
- Three-dimensional assembly
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Applied Mathematics
- Electrical and Electronic Engineering
- Computer Science Applications