Fingerprint
Dive into the research topics of 'High-yield assembly of hinged 3-D optical MEMS devices using magnetic actuation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
High-yield assembly of hinged 3-D optical MEMS devices using magnetic actuation
Yong Yi*, Chang Liu
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
1
Scopus
citations