Holographic 3D imaging of microstructures

M. Balberg*, G. Barbastathis, D. J. Brady, Bo K. Choi, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalConference article

Abstract

A volume holographic matched filter is used for three-dimensional imaging of silicon microstructures. The filter is designed by recording a hologram that is matched to the object depth, allowing confocal imaging of the structure. Confocal imaging of micro devices provides the capability to image the performance of the device, which is not possible in scanning-electron-microscopes (SEM). A matched holographic filter can also provide more information about the device than regular confocal imaging. We present a scanned image of a silicon wafer with micro-fabricated trenches.

Original languageEnglish (US)
Pages (from-to)202-207
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3801
StatePublished - Dec 1 1999
EventProceedings of the 1999 Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications V - Denver, CO, USA
Duration: Jul 18 1999Jul 19 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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