Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy

Ryan A. Hackler, Michael O. McAnally, George C. Schatz, Peter C. Stair, Richard P. Van Duyne*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Medicine & Life Sciences