@inproceedings{1c7df65c77974d99bc431b738d14eefe,
title = "Image reconstruction techniques for high numerical aperture integrated circuit imaging",
abstract = "As feature sizes in integrated circuits (ICs) become smaller, higher-resolution defect detection and failure analysis techniques are required. The introduction of solid immersion lenses (SIL) has been an enabling technology for high-resolution backside IC imaging. High Numerical Aperture (NA) SIL imaging introduces properties of focused light which cannot be predicted by scalar beam optics. For example, spatial resolution can be manipulated in selected directions by modification of the polarization direction in linearly polarized light. In this work, we propose a unified framework combining multiple SIL microscopy images collected using polarizations at different directions in order to improve image reconstruction performance and ultimately resolution and defect localization. We show improvement in reconstruction quality by combining data taken using light with multiple polarizations. We demonstrate the effectiveness of our framework on experimental data.",
author = "Cilingiroglu, \{T. Berkin\} and Koklu, \{F. Hakan\} and Euan Ramsay and Yang Lu and Abdulkadir Yurt and Karl, \{W. Clem\} and Janusz Konrad and Goldberg, \{Bennett B.\} and Unlu, \{M. Selim\}",
year = "2012",
language = "English (US)",
isbn = "9781615039791",
series = "Conference Proceedings from the International Symposium for Testing and Failure Analysis",
publisher = "ASM International",
pages = "551--556",
booktitle = "ISTFA 2012 - Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis",
note = "38th International Symposium for Testing and Failure Analysis, ISTFA 2012 ; Conference date: 11-11-2012 Through 15-11-2012",
}