Image reconstruction techniques for high numerical aperture integrated circuit imaging

T. Berkin Cilingiroglu*, F. Hakan Koklu, Euan Ramsay, Yang Lu, Abdulkadir Yurt, W. Clem Karl, Janusz Konrad, Bennett B. Goldberg, M. Selim Unlu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

As feature sizes in integrated circuits (ICs) become smaller, higher-resolution defect detection and failure analysis techniques are required. The introduction of solid immersion lenses (SIL) has been an enabling technology for high-resolution backside IC imaging. High Numerical Aperture (NA) SIL imaging introduces properties of focused light which cannot be predicted by scalar beam optics. For example, spatial resolution can be manipulated in selected directions by modification of the polarization direction in linearly polarized light. In this work, we propose a unified framework combining multiple SIL microscopy images collected using polarizations at different directions in order to improve image reconstruction performance and ultimately resolution and defect localization. We show improvement in reconstruction quality by combining data taken using light with multiple polarizations. We demonstrate the effectiveness of our framework on experimental data.

Original languageEnglish (US)
Title of host publicationISTFA 2012 - Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis
PublisherASM International
Pages551-556
Number of pages6
ISBN (Print)9781615039791
StatePublished - Jan 1 2012
Event38th International Symposium for Testing and Failure Analysis, ISTFA 2012 - Phoenix, AZ, United States
Duration: Nov 11 2012Nov 15 2012

Other

Other38th International Symposium for Testing and Failure Analysis, ISTFA 2012
CountryUnited States
CityPhoenix, AZ
Period11/11/1211/15/12

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

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