@inproceedings{9ee32260b6f84895bab7d3dc0adb1898,
title = "Imaging performance of aSIL microscopy on subsurface imaging of SOI chips",
author = "Aydan Uyar and Abdulkadir Yurt and Cilingiroglu, {T. Berkin} and Goldberg, {Bennett B.} and {\"U}nl{\"u}, {M. Selim}",
year = "2014",
month = jan,
day = "1",
language = "English (US)",
volume = "2014-January",
pages = "293--295",
booktitle = "ISTFA 2014 - Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis",
publisher = "ASM International",
edition = "January",
note = "40th International Symposium for Testing and Failure Analysis, ISTFA 2014 ; Conference date: 09-11-2014 Through 13-11-2014",
}