Imaging performance of aSIL microscopy on subsurface imaging of SOI chips

Aydan Uyar, Abdulkadir Yurt, T. Berkin Cilingiroglu, Bennett B. Goldberg, M. Selim Ünlü

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationISTFA 2014 - Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis
PublisherASM International
Pages293-295
Number of pages3
Volume2014-January
EditionJanuary
StatePublished - Jan 1 2014
Event40th International Symposium for Testing and Failure Analysis, ISTFA 2014 - Houston, United States
Duration: Nov 9 2014Nov 13 2014

Other

Other40th International Symposium for Testing and Failure Analysis, ISTFA 2014
CountryUnited States
CityHouston
Period11/9/1411/13/14

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality
  • Electrical and Electronic Engineering

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