Improved pattern transfer in soft lithography using composite stamps

Teri W. Odom; J. Christopher Love; Daniel B. Wolfe; Kateri E. Paul; George M. Whitesides

doi:10.1021/la020169l

Improved pattern transfer in soft lithography using composite stamps

Teri W. Odom, J. Christopher Love, Daniel B. Wolfe, Kateri E. Paul, George M. Whitesides^*

^*Corresponding author for this work

Chemistry

Research output: Contribution to journal › Article › peer-review

659 Scopus citations

Abstract

Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

Original language	English (US)
Pages (from-to)	5314-5320
Number of pages	7
Journal	Langmuir
Volume	18
Issue number	13
DOIs	https://doi.org/10.1021/la020169l
State	Published - Jun 25 2002

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Surfaces and Interfaces
Spectroscopy
Electrochemistry

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10.1021/la020169l

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title = "Improved pattern transfer in soft lithography using composite stamps",

abstract = "Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).",

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AU - Love, J. Christopher

AU - Wolfe, Daniel B.

AU - Paul, Kateri E.

AU - Whitesides, George M.

PY - 2002/6/25

Y1 - 2002/6/25

N2 - Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

AB - Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

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Improved pattern transfer in soft lithography using composite stamps

Abstract

ASJC Scopus subject areas

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