TY - JOUR
T1 - In-situ Fourier transform IR emission spectroscopy of diamond chemical vapor deposition
AU - Spiberg, P.
AU - Woodin, R. L.
AU - Butler, J. E.
AU - Dhar, L.
N1 - Funding Information:
This work was sponsored in part by the Office of Naval Research (contract N00014-9 l-C-0012) and the Naval Research Laboratory (contract N00014-91-C-2166) with funding from the Defense Advanced Research Projects Agency. The authors are grateful for the technical support of Dr. G. L. Cann and Technion, Inc. in carrying out these experiments and to Nicolet Corporation for the use of the spectrometer used in these studies.
Copyright:
Copyright 2004 Elsevier B.V., All rights reserved.
PY - 1993/1/1
Y1 - 1993/1/1
N2 - Characterization of diamond film during chemical vapor deposition provides new understanding of the deposition process. The mid-IR spectral region contains detailed information on molecular vibrations and hence the chemical structures present in the polycrystalline film. Using Fourier transform IR spectroscopy to study the radiation emitted by externally heated diamond films, we detect both the two-phonon transitions around 2200 cm-1 and the presence of sp3 C-H vibrations near 2800 cm-1. Measurements are conducted with samples of different qualities and the signals from both the two-phonon transition and the C-H emission are correlated with the diamond thermal conductivity. These two signals are then measured in situ during deposition in a d.c. plasma jet reactor. Their evolution is monitored as a function of film growth and process parameters, again correlating with film quality. The technique is then evaluated as an on-line quality-monitoring tool.
AB - Characterization of diamond film during chemical vapor deposition provides new understanding of the deposition process. The mid-IR spectral region contains detailed information on molecular vibrations and hence the chemical structures present in the polycrystalline film. Using Fourier transform IR spectroscopy to study the radiation emitted by externally heated diamond films, we detect both the two-phonon transitions around 2200 cm-1 and the presence of sp3 C-H vibrations near 2800 cm-1. Measurements are conducted with samples of different qualities and the signals from both the two-phonon transition and the C-H emission are correlated with the diamond thermal conductivity. These two signals are then measured in situ during deposition in a d.c. plasma jet reactor. Their evolution is monitored as a function of film growth and process parameters, again correlating with film quality. The technique is then evaluated as an on-line quality-monitoring tool.
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M3 - Conference article
AN - SCOPUS:0027580655
VL - 2
SP - 708
EP - 712
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 5 -7 pt 2
T2 - Proceedings of the 3rd International Conference on the New Diamond Science and Technology (ICNDST-3) jointly with 3rd European Conference on Diamond, Diamond-like and Related Coatings (DF '92). Part 2 (of 2)
Y2 - 31 August 1992 through 4 September 1992
ER -