In Situ Growth of Epitaxial YAlO3 Thin Films by Metal-Organic Chemical Vapor Deposition

Bin Han, Deborah A. Neumayer, Douglas L. Schulz, Bruce J. Hinds, Tobin J. Marks*, Hong Zhang, Vinayak P. Dravid

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations
Original languageEnglish (US)
Pages (from-to)14-16
Number of pages3
JournalChemistry of Materials
Issue number1
StatePublished - 1993

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

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