In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

J. Q. Zheng; X. K. Wang; M. C. Shih; S. Williams; J. So; S. J. Lee; P. Dutta; R. P.H. Chang; J. B. Ketterson

doi:10.1063/1.104906

In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

J. Q. Zheng^*, X. K. Wang, M. C. Shih, S. Williams, J. So, S. J. Lee, P. Dutta, R. P.H. Chang, J. B. Ketterson

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO₃ using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

Original language	English (US)
Pages (from-to)	2303-2305
Number of pages	3
Journal	Applied Physics Letters
Volume	58
Issue number	20
DOIs	https://doi.org/10.1063/1.104906
State	Published - 1991

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{5781413989c64faeb82172f302210917,

title = "In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth",

abstract = "We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.",

author = "Zheng, {J. Q.} and Wang, {X. K.} and Shih, {M. C.} and S. Williams and J. So and Lee, {S. J.} and P. Dutta and Chang, {R. P.H.} and Ketterson, {J. B.}",

year = "1991",

doi = "10.1063/1.104906",

language = "English (US)",

volume = "58",

pages = "2303--2305",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

AU - Zheng, J. Q.

AU - Wang, X. K.

AU - Shih, M. C.

AU - Williams, S.

AU - So, J.

AU - Lee, S. J.

AU - Dutta, P.

AU - Chang, R. P.H.

AU - Ketterson, J. B.

PY - 1991

Y1 - 1991

N2 - We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

AB - We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

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UR - http://www.scopus.com/inward/citedby.url?scp=0039191349&partnerID=8YFLogxK

U2 - 10.1063/1.104906

DO - 10.1063/1.104906

M3 - Article

AN - SCOPUS:0039191349

SN - 0003-6951

VL - 58

SP - 2303

EP - 2305

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 20

ER -

In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

Abstract

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