In situ x-ray diffraction studies of YBa2Cu3O x

S. Williams*, J. Q. Zheng, M. C. Shih, X. K. Wang, S. J. Lee, E. D. Rippert, S. Maglic, Hiroshi Kajiyama, D. Segel, P. Dutta, R. P.H. Chang, J. B. Ketterson, T. Roberts, Y. Lin, R. T. Kampwirth, K. Gray

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.

Original languageEnglish (US)
Pages (from-to)4798-4804
Number of pages7
JournalJournal of Applied Physics
Issue number10
StatePublished - Dec 1 1992

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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