Indium-phosphide-based microresonator modulators and wavelength multiplexers

J. H. Abeles*, M. H. Kwakernaak, H. Mohseni, A. N. Lepore, G. A. Pajer, G. Griffel, T. P. Lee, A. M. Braun, D. R. Bechtle, Z. A. Shellenbarger, I. Adesida, S. Rommel, J. W. Bae, J. H. Jang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


The combination of nanofabrication techniques, laterally coupled micro-ring -resonator modulator design, angle multi-mode interference couplers, and highly efficient InP-based modulator materials, were studied to demonstrate wavelength selective modulator arrays. A low-capacitance self-aligned electrode current was employed to permit high-speed modulation of 1-μm-wide waveguide ridges possessing low capacitance. High-aspect-ratio ridges are formed by Cl/Ar/H inductively coupled plasma reactive ion etching with wall roughness of a few nm. Digital modulation at 1 GHz shows good sensitivity of 600 mV peak-to-peak.

Original languageEnglish (US)
Pages (from-to)60-61
Number of pages2
JournalLEOS Summer Topical Meeting
StatePublished - 2004
Event2004 Digest of the LEOS Summer Topical Meetings - San Diego, CA, United States
Duration: Jul 28 2004Jul 30 2004

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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