Abstract
The combination of nanofabrication techniques, laterally coupled micro-ring -resonator modulator design, angle multi-mode interference couplers, and highly efficient InP-based modulator materials, were studied to demonstrate wavelength selective modulator arrays. A low-capacitance self-aligned electrode current was employed to permit high-speed modulation of 1-μm-wide waveguide ridges possessing low capacitance. High-aspect-ratio ridges are formed by Cl/Ar/H inductively coupled plasma reactive ion etching with wall roughness of a few nm. Digital modulation at 1 GHz shows good sensitivity of 600 mV peak-to-peak.
Original language | English (US) |
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Pages (from-to) | 60-61 |
Number of pages | 2 |
Journal | LEOS Summer Topical Meeting |
State | Published - 2004 |
Event | 2004 Digest of the LEOS Summer Topical Meetings - San Diego, CA, United States Duration: Jul 28 2004 → Jul 30 2004 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering