Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering

Dong Li, Yip-Wah Chung, Shengtian Yang, Ming Show Wong, Farshid Adibi, William D. Sproul

Research output: Contribution to journalArticle

76 Scopus citations

Abstract

Carbon nitride thin films were prepared by dc magnetron sputtering of a graphite target in a nitrogen containing gas mixture onto Si(100) substrates held at ambient temperatures. All CNxcoatings grown to a thickness of 1.5 μm are adherent and smooth. Infrared absorption and isotropic nitrogen labeling indicate that carbon and nitrogen are chemically bonded together. Both solid-state 13C and l5N magic angle spinning nuclear magnetic resonance (NMR) analyses were performed. NMR measurements indicate the presence of sp2bonded C and N.

Original languageEnglish (US)
Pages (from-to)1470-1473
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume12
Issue number4
DOIs
StatePublished - Jan 1 1994

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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