InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

Yong Ma, Gilbert Chang, Seoijin Park, Liwei Wang, Seng Tiong Ho

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

Original languageEnglish (US)
Pages (from-to)1495-1497
Number of pages3
JournalIEEE Photonics Technology Letters
Volume12
Issue number11
DOIs
StatePublished - Nov 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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