InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

Yong Ma; Gilbert Chang; Seoijin Park; Liwei Wang; Seng Tiong Ho

doi:10.1109/68.887713

InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

Yong Ma, Gilbert Chang, Seoijin Park, Liwei Wang, Seng Tiong Ho

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

Original language	English (US)
Pages (from-to)	1495-1497
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	12
Issue number	11
DOIs	https://doi.org/10.1109/68.887713
State	Published - Nov 2000

Funding

Manuscript received June 8, 2000; revised July 24, 2000. This work was supported by DARPA/AFOSR Program under Award F49620-96-0262/P005 and made use of MRSEC Control Facilities of Northwestern University supported by the NSF under Award DMR-9632472.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/68.887713

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title = "InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters",

abstract = "10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.",

author = "Yong Ma and Gilbert Chang and Seoijin Park and Liwei Wang and Ho, \{Seng Tiong\}",

note = "Funding Information: Manuscript received June 8, 2000; revised July 24, 2000. This work was supported by DARPA/AFOSR Program under Award F49620-96-0262/P005 and made use of MRSEC Control Facilities of Northwestern University supported by the NSF under Award DMR-9632472.",

year = "2000",

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doi = "10.1109/68.887713",

language = "English (US)",

volume = "12",

pages = "1495--1497",

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T1 - InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

AU - Ma, Yong

AU - Chang, Gilbert

AU - Park, Seoijin

AU - Wang, Liwei

AU - Ho, Seng Tiong

N1 - Funding Information: Manuscript received June 8, 2000; revised July 24, 2000. This work was supported by DARPA/AFOSR Program under Award F49620-96-0262/P005 and made use of MRSEC Control Facilities of Northwestern University supported by the NSF under Award DMR-9632472.

PY - 2000/11

Y1 - 2000/11

N2 - 10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

AB - 10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

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InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

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