Inhibiting metal oxide atomic layer deposition: Beyond zinc oxide

Matthew D. Sampson, Jonathan D. Emery, Michael J. Pellin, Alex B.F. Martinson*

*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

25 Scopus citations

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Biochemistry, Genetics and Molecular Biology

Chemistry

Material Science

Engineering

Pharmacology, Toxicology and Pharmaceutical Science