Integrated microfluidic linking chip for scanning probe nanolithography

Kee Suk Ryu, Xuefeng Wang, Kashan Shaikh, David Bullen, Edgar Goluch, Jun Zou, Chang Liu*, Chad A. Mirkin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

The methods for inking scanning probes for direct soft lithography in microfluidic chip were investigated. The microfluidic chip consists of thin film poly (dimethylsiloxane) (PDMS). Thin PDMS membranes were used as inkpads and minimized the evaporation of the ink and cross contamination between the inking sites. It was concluded that the inking chip provides high-density inking, easy loading of inks and reduced evaporation loss.

Original languageEnglish (US)
Pages (from-to)136-138
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number1
DOIs
StatePublished - Jul 5 2004

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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