Integration of a MEMS education curriculum with interdisciplinary research

Chang Liu

Integration of a MEMS education curriculum with interdisciplinary research

Chang Liu^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under development at the University of Illinois. The plan contains three steps - introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects.

Original language	English (US)
Pages (from-to)	137-140
Number of pages	4
Journal	Biennial University/Government/Industry Microelectronics Symposium - Proceedings
State	Published - Dec 1 1997

ASJC Scopus subject areas

Electrical and Electronic Engineering
Media Technology

Access to Document

Fingerprint Dive into the research topics of 'Integration of a MEMS education curriculum with interdisciplinary research'. Together they form a unique fingerprint.

Cite this

@article{b8fc21f584a549a68ebe7ba624a014c3,

title = "Integration of a MEMS education curriculum with interdisciplinary research",

abstract = "Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under development at the University of Illinois. The plan contains three steps - introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects.",

author = "Chang Liu",

year = "1997",

month = dec,

day = "1",

language = "English (US)",

pages = "137--140",

journal = "Biennial University/Government/Industry Microelectronics Symposium - Proceedings",

issn = "0749-6877",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Integration of a MEMS education curriculum with interdisciplinary research

AU - Liu, Chang

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under development at the University of Illinois. The plan contains three steps - introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects.

AB - Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under development at the University of Illinois. The plan contains three steps - introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects.

UR - http://www.scopus.com/inward/record.url?scp=0031385092&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031385092&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031385092

SP - 137

EP - 140

JO - Biennial University/Government/Industry Microelectronics Symposium - Proceedings

JF - Biennial University/Government/Industry Microelectronics Symposium - Proceedings

SN - 0749-6877

ER -