Integration of modeling and acoustic microscopy measurements for thin films

Zhiqi Guo*, J. D. Achenbach, Anita Madan, Keith Martin, M. E. Graham

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


A model for measuring the V(z) curve by line-focus acoustic microscopy contains the reflectance function of the specimen as a principal component. In this paper the reflectance function has been analyzed for multilayered thin films on a substrate for both fast-on-slow and slow-on-fast systems. The phase velocities of modes of surface acoustic wave propagation and their associated mode reflection coefficients can be obtained from the reflectance function. This information can be used together with estimates of the elastic constants to determine suitable frequency ranges for measuring the V(z) curve. Minimization of the difference between phase velocities obtained from measured and calculated V(z) curves is used to determine the elastic constants. Results are presented for TiN films on M2 high-speed steel substrates. (C) 2000 Acoustical Society of America.

Original languageEnglish (US)
Pages (from-to)2462-2471
Number of pages10
Journaljournal of the Acoustical Society of America
Issue number5 I
StatePublished - May 30 2000

ASJC Scopus subject areas

  • Arts and Humanities (miscellaneous)
  • Acoustics and Ultrasonics

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