Integration of single multi-walled carbon nanotube on micro systems

Jaehyun Chung; Junghoon Lee; Rodney S. Ruoff; Wing K Liu

doi:10.1115/IMECE2002-33325

Integration of single multi-walled carbon nanotube on micro systems

Jaehyun Chung^*, Junghoon Lee, Rodney S. Ruoff, Wing K Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.

Original language	English (US)
Title of host publication	Microelectromechanical Systems
Publisher	American Society of Mechanical Engineers (ASME)
Pages	77-81
Number of pages	5
ISBN (Print)	0791836428, 9780791836422
DOIs	https://doi.org/10.1115/IMECE2002-33325
State	Published - Jan 1 2002

Keywords

Carbon nanotube
Electric field guided deposition

ASJC Scopus subject areas

Mechanical Engineering

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title = "Integration of single multi-walled carbon nanotube on micro systems",

abstract = "This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.",

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AU - Lee, Junghoon

AU - Ruoff, Rodney S.

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N2 - This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.

AB - This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.

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KW - Electric field guided deposition

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BT - Microelectromechanical Systems

PB - American Society of Mechanical Engineers (ASME)

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Integration of single multi-walled carbon nanotube on micro systems

Abstract

Keywords

ASJC Scopus subject areas

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