Integration of single multi-walled carbon nanotube on micro systems

Jaehyun Chung*, Junghoon Lee, Rodney S. Ruoff, Wing K Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages77-81
Number of pages5
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - Jan 1 2002

Keywords

  • Carbon nanotube
  • Electric field guided deposition

ASJC Scopus subject areas

  • Mechanical Engineering

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