Inter-layer grating coupler on double-layer silicon nanomembranes

Yang Zhang; David Kwong; Xiaochuan Xu; Amir Hosseini; Sang Y. Yang; John A. Rogers; Ray T. Chen

doi:10.1109/OIC.2013.6552911

Inter-layer grating coupler on double-layer silicon nanomembranes

Yang Zhang, David Kwong, Xiaochuan Xu, Amir Hosseini, Sang Y. Yang, John A. Rogers, Ray T. Chen

Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.

Original language	English (US)
Title of host publication	2013 Optical Interconnects Conference, OI 2013
Pages	35-36
Number of pages	2
DOIs	https://doi.org/10.1109/OIC.2013.6552911
State	Published - Aug 30 2013
Event	2013 IEEE Optical Interconnects Conference, OI 2013 - Santa Fe, NM, United States Duration: May 5 2013 → May 8 2013

Other

Other	2013 IEEE Optical Interconnects Conference, OI 2013
Country/Territory	United States
City	Santa Fe, NM
Period	5/5/13 → 5/8/13

Keywords

Inter-layer grating coupler
silicon nanomembrane
subwavelength nanostructure

ASJC Scopus subject areas

Hardware and Architecture
Electronic, Optical and Magnetic Materials

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10.1109/OIC.2013.6552911

Cite this

@inproceedings{fdcb203bdef8407488660817f470c429,

title = "Inter-layer grating coupler on double-layer silicon nanomembranes",

abstract = "We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.",

keywords = "Inter-layer grating coupler, silicon nanomembrane, subwavelength nanostructure",

author = "Yang Zhang and David Kwong and Xiaochuan Xu and Amir Hosseini and Yang, {Sang Y.} and Rogers, {John A.} and Chen, {Ray T.}",

year = "2013",

month = aug,

day = "30",

doi = "10.1109/OIC.2013.6552911",

language = "English (US)",

isbn = "9781467350617",

pages = "35--36",

booktitle = "2013 Optical Interconnects Conference, OI 2013",

note = "2013 IEEE Optical Interconnects Conference, OI 2013 ; Conference date: 05-05-2013 Through 08-05-2013",

}

TY - GEN

T1 - Inter-layer grating coupler on double-layer silicon nanomembranes

AU - Zhang, Yang

AU - Kwong, David

AU - Xu, Xiaochuan

AU - Hosseini, Amir

AU - Yang, Sang Y.

AU - Rogers, John A.

AU - Chen, Ray T.

PY - 2013/8/30

Y1 - 2013/8/30

N2 - We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.

AB - We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.

KW - Inter-layer grating coupler

KW - silicon nanomembrane

KW - subwavelength nanostructure

UR - http://www.scopus.com/inward/record.url?scp=84883015813&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883015813&partnerID=8YFLogxK

U2 - 10.1109/OIC.2013.6552911

DO - 10.1109/OIC.2013.6552911

M3 - Conference contribution

AN - SCOPUS:84883015813

SN - 9781467350617

SP - 35

EP - 36

BT - 2013 Optical Interconnects Conference, OI 2013

T2 - 2013 IEEE Optical Interconnects Conference, OI 2013

Y2 - 5 May 2013 through 8 May 2013

ER -

Inter-layer grating coupler on double-layer silicon nanomembranes

Abstract

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Keywords

ASJC Scopus subject areas

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