Interface Engineering of Si Hybrid Nanostructures for Chemical and Biological Sensing

Jinghua Li, John A. Rogers*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

1 Scopus citations


Opportunities for quantitative, real-time monitoring of gases, ions, and biomolecules in the environment and in the human body motivate programs of fundamental and applied research on chemically selective sensors with fast response times. In this context, silicon field-effect transistors are of considerable interest as label-free, scalable platforms for detecting a variety of chemical and biological species. Herein, recent progress and research directions in this area are reviewed. The focus of this article is on operational parameters, device architectures, schemes for surface chemical functionalization, and methods for bio-integration across a variety of use cases. The content includes strategies that combine Si with other functional materials to create hybrid structures for enhanced sensing performance. The final section highlights some remaining challenges and provides perspectives on the future of basic research and engineering development in this field.

Original languageEnglish (US)
Article number2000380
JournalAdvanced Materials Technologies
Issue number8
StatePublished - Aug 1 2020


  • bio-integrated electronics
  • chemical and biological sensing
  • field-effect transistors
  • interface engineering

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Industrial and Manufacturing Engineering

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