Interfacial layer effects in Ba1-xSrxTiO3 thick films prepared by plasma spray

Kipyung Ahn*, Bruce W. Wessels, Sanjay Sampath

*Corresponding author for this work

Research output: Contribution to journalConference article

3 Scopus citations

Abstract

The dielectric properties of high k dielectric thick films prepared by thermal spray were investigated. BaTiO3 and Ba0.68Sr0.32TiO3 thick films were deposited using plasma spray on Ag·Pd screen-printed alumina substrates. The sprayed films were predominantly polycrystalline but contained an amorphous second phase. The dielectric constants of the films decreased with decreasing film thickness in 10 ∼ 60 μm range. This was attributed to the presence of an interfacial layer between the film and the substrate as determined by capacitance measurements. The capacitance density of the interfacial layer was determined to be ∼ 2.7 nF/cm2. The capacitance density of the interfacial layer increased to 12 nF/cm2 after post heat treatment at 500°C for 20 hours.

Original languageEnglish (US)
Pages (from-to)85-90
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume758
StatePublished - Sep 5 2003
EventRapid Prototyping Technologies - Boston, MA, United States
Duration: Dec 3 2002Dec 5 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Interfacial layer effects in Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thick films prepared by plasma spray'. Together they form a unique fingerprint.

  • Cite this