Interferometric mapping of charge carrier modulation in CMOS ICs

Abdulkadir Yurt, Euan Ramsay, Chris Stockbridge, Yang Lu, M. Selim Unlu, Bennett B. Goldberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FIO 2012
PublisherOptical Society of America (OSA)
ISBN (Print)9781557529565
StatePublished - 2012
Externally publishedYes
EventFrontiers in Optics, FIO 2012 - Rochester, NY, United States
Duration: Oct 14 2012Oct 18 2012

Publication series

NameFrontiers in Optics, FIO 2012


OtherFrontiers in Optics, FIO 2012
Country/TerritoryUnited States
CityRochester, NY

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


Dive into the research topics of 'Interferometric mapping of charge carrier modulation in CMOS ICs'. Together they form a unique fingerprint.

Cite this