Interferometric mapping of charge carrier modulation in CMOS ICs

Abdulkadir Yurt; Euan Ramsay; Chris Stockbridge; Yang Lu; M. Selim Unlu; Bennett B. Goldberg

doi:10.1364/fio.2012.ftu3a.7

Interferometric mapping of charge carrier modulation in CMOS ICs

Abdulkadir Yurt, Euan Ramsay, Chris Stockbridge, Yang Lu, M. Selim Unlu, Bennett B. Goldberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.

Original language	English (US)
Title of host publication	Frontiers in Optics, FIO 2012
Publisher	Optical Society of America (OSA)
ISBN (Print)	9781557529565
DOIs	https://doi.org/10.1364/fio.2012.ftu3a.7
State	Published - 2012
Externally published	Yes
Event	Frontiers in Optics, FIO 2012 - Rochester, NY, United States Duration: Oct 14 2012 → Oct 18 2012

Publication series

Name	Frontiers in Optics, FIO 2012

Other

Other	Frontiers in Optics, FIO 2012
Country/Territory	United States
City	Rochester, NY
Period	10/14/12 → 10/18/12

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/fio.2012.ftu3a.7

Cite this

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title = "Interferometric mapping of charge carrier modulation in CMOS ICs",

abstract = "We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.",

author = "Abdulkadir Yurt and Euan Ramsay and Chris Stockbridge and Yang Lu and Unlu, {M. Selim} and Goldberg, {Bennett B.}",

year = "2012",

doi = "10.1364/fio.2012.ftu3a.7",

language = "English (US)",

isbn = "9781557529565",

series = "Frontiers in Optics, FIO 2012",

publisher = "Optical Society of America (OSA)",

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note = "Frontiers in Optics, FIO 2012 ; Conference date: 14-10-2012 Through 18-10-2012",

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T1 - Interferometric mapping of charge carrier modulation in CMOS ICs

AU - Yurt, Abdulkadir

AU - Ramsay, Euan

AU - Stockbridge, Chris

AU - Lu, Yang

AU - Unlu, M. Selim

AU - Goldberg, Bennett B.

PY - 2012

Y1 - 2012

N2 - We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.

AB - We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.

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U2 - 10.1364/fio.2012.ftu3a.7

DO - 10.1364/fio.2012.ftu3a.7

M3 - Conference contribution

AN - SCOPUS:85087593039

SN - 9781557529565

T3 - Frontiers in Optics, FIO 2012

BT - Frontiers in Optics, FIO 2012

PB - Optical Society of America (OSA)

T2 - Frontiers in Optics, FIO 2012

Y2 - 14 October 2012 through 18 October 2012

ER -

Interferometric mapping of charge carrier modulation in CMOS ICs

Abstract

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Other

ASJC Scopus subject areas

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