Ion-Assisted Deposition of Thin Films

S.A. Barnett, C.-H. Choi, R. Kaspi, J. Mirecki-Millunchick

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationBeam Processing of Advanced Materials
EditorsJ. Singh, S.M. Copley
Place of PublicationWarrendale
PublisherThe Minerals, Metals & Materials Society
Pages561
StatePublished - 1993

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