Original language | English |
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Title of host publication | Beam Processing of Advanced Materials |
Editors | J. Singh, S.M. Copley |
Place of Publication | Warrendale |
Publisher | The Minerals, Metals & Materials Society |
Pages | 561 |
State | Published - 1993 |
Ion-Assisted Deposition of Thin Films
S.A. Barnett, C.-H. Choi, R. Kaspi, J. Mirecki-Millunchick
Research output: Chapter in Book/Report/Conference proceeding › Chapter