Ion Energy and Dose Effects during Ion Assisted Epitaxial Growth of InAs on Si(100)

C.H. Choi, S.A. Barnett

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationCharacterization and Processing of Materials Using Ion Beams
EditorsL.E. Rehn, J.E. Greene, F.A. Smidt
Place of PublicationPittsburgh
PublisherMater. Res. Soc.
StatePublished - 1989

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