Ion Energy and Dose Effects during Ion Assisted Epitaxial Growth of InAs on Si(100)

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Characterization and Processing of Materials Using Ion Beams
Editors	L.E. Rehn, J.E. Greene, F.A. Smidt
Place of Publication	Pittsburgh
Publisher	Mater. Res. Soc.
Pages	689
State	Published - 1989

Cite this

@inbook{471406b12c754fa1b714838c0ecd2897,

title = "Ion Energy and Dose Effects during Ion Assisted Epitaxial Growth of InAs on Si(100)",

author = "C.H. Choi and S.A. Barnett",

year = "1989",

language = "English",

pages = "689",

editor = "L.E. Rehn and J.E. Greene and F.A. Smidt",

booktitle = "Characterization and Processing of Materials Using Ion Beams",

publisher = "Mater. Res. Soc.",

}