Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

J. M. Chabala; R. P R Chang; J. B. Ketterson; R. Levi-Setti; D. X. Li; Y. L. Wang; X. K. Wang

doi:10.1016/0921-4534(89)90924-6

Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

J. M. Chabala^*, R. P R Chang, J. B. Ketterson, R. Levi-Setti, D. X. Li, Y. L. Wang, X. K. Wang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The chemical and structural properties of epitaxial Y₁Ba₂Cu₃(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

Original language	English (US)
Pages (from-to)	75-76
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	162-164
Issue number	PART 1
DOIs	https://doi.org/10.1016/0921-4534(89)90924-6
State	Published - Dec 1989

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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10.1016/0921-4534(89)90924-6

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@article{79d64e4c217b449f92e20a2f95537f54,

title = "Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing",

abstract = "The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.",

author = "Chabala, {J. M.} and Chang, {R. P R} and Ketterson, {J. B.} and R. Levi-Setti and Li, {D. X.} and Wang, {Y. L.} and Wang, {X. K.}",

note = "Funding Information: This work was supported by the NSF Science and Technology Center for Superconductivity",

year = "1989",

month = dec,

doi = "10.1016/0921-4534(89)90924-6",

language = "English (US)",

volume = "162-164",

pages = "75--76",

journal = "Physica C: Superconductivity and its applications",

issn = "0921-4534",

publisher = "Elsevier",

number = "PART 1",

}

TY - JOUR

T1 - Ion microprobe characterization of e-beam deposited YBaCu(F)O films

T2 - Effects of post-deposition processing

AU - Chabala, J. M.

AU - Chang, R. P R

AU - Ketterson, J. B.

AU - Levi-Setti, R.

AU - Li, D. X.

AU - Wang, Y. L.

AU - Wang, X. K.

N1 - Funding Information: This work was supported by the NSF Science and Technology Center for Superconductivity

PY - 1989/12

Y1 - 1989/12

N2 - The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

AB - The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

UR - http://www.scopus.com/inward/record.url?scp=0024875669&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024875669&partnerID=8YFLogxK

U2 - 10.1016/0921-4534(89)90924-6

DO - 10.1016/0921-4534(89)90924-6

M3 - Article

AN - SCOPUS:0024875669

SN - 0921-4534

VL - 162-164

SP - 75

EP - 76

JO - Physica C: Superconductivity and its applications

JF - Physica C: Superconductivity and its applications

IS - PART 1

ER -

Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

Abstract

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