Ion-scattering spectroscopy during InGaAs molecular beam epitaxy: Reduction of sputtering using glancing-angle Ar ions

J. G.C. Labanda*, S. A. Barnett

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint Dive into the research topics of 'Ion-scattering spectroscopy during InGaAs molecular beam epitaxy: Reduction of sputtering using glancing-angle Ar ions'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy