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Ion-scattering spectroscopy during InGaAs molecular beam epitaxy: Reduction of sputtering using glancing-angle Ar ions
J. G.C. Labanda
*
,
S. A. Barnett
*
Corresponding author for this work
Materials Science and Engineering
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peer-review
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Chemical Compounds
Molecular beam epitaxy
Sputtering
Spectroscopy
Scattering
Ions
gallium arsenide
Atoms
Reflection high energy electron diffraction
indium arsenide
Ion beams
Thick films
Engineering & Materials Science
Molecular beam epitaxy
Sputtering
Spectroscopy
Scattering
Ions
Atoms
Reflection high energy electron diffraction
Ion beams
Thick films
Physics & Astronomy
ion scattering
molecular beam epitaxy
sputtering
spectroscopy
ions
impingement
atoms
high energy electrons
thick films
electron diffraction
incidence
ion beams
damage
dosage
oscillations