Ion-Surface Interactions During Epitaxy

S.A. Barnett, C.-H. Choi, R. Kaspi

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationSurface Chemistry and Beam-Solid Interactions
EditorsH.A. Atwater, F.A. Houle, D. Lowndes
Place of PublicationPittsburgh
PublisherMRS
Pages43
StatePublished - 1991

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