@inproceedings{89cef1ff46c0401f9d19ae1664d9672d,
title = "IOTA: Towards an integrated on-chip thermocouple array",
abstract = "We present the design concept of a bimetallic thermocouple array-based temperature sensor to monitor thermal behavior of integrated circuits. Our proposed design is able to provide fine-grain thermal characterization. Such a sensor array that is capable of monitoring a large area accurately at a fine granularity is essential to perform reliable and effective dynamic thermal management for high performance chips. Since our proposed thermocouple array-based sensor uses only metals, the resulting sensor design occupies minimal area on the silicon layer. Furthermore, we show that such a metal-based design is advantageous in mitigating process variations. The working principle of the proposed thermocouple array is demonstrated with a bimetallic macroscopic prototype. Our thermocouple prototype tracks the temperature variation from 20 °C to 160 °C to within less than 1 °C. Furthermore, our analysis indicates that the sensor array is robust against process variations to a thermal accuracy of less than 1 °C.",
author = "Jieyi Long and Klock, {Andrea Grace} and Chuanle Zhou and Memik, {Seda Ogrenci} and Matthew Grayson",
year = "2010",
month = dec,
day = "28",
language = "English (US)",
isbn = "9782355000126",
series = "16th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2010",
pages = "7--12",
booktitle = "16th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2010",
note = "16th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2010 ; Conference date: 06-10-2010 Through 08-10-2010",
}